Invention Grant
US09106199B2 Acoustic wave device including a surface wave filter and a bulk wave filter, and method for making same
有权
包括表面波滤波器和体波滤波器的声波器件及其制造方法
- Patent Title: Acoustic wave device including a surface wave filter and a bulk wave filter, and method for making same
- Patent Title (中): 包括表面波滤波器和体波滤波器的声波器件及其制造方法
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Application No.: US13500614Application Date: 2010-10-04
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Publication No.: US09106199B2Publication Date: 2015-08-11
- Inventor: Chrystel Deguet , Laurent Clavelier , Emmanuel Defay , Alexandre Reinhardt
- Applicant: Chrystel Deguet , Laurent Clavelier , Emmanuel Defay , Alexandre Reinhardt
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Baker & Hostetler LLP
- Priority: FR0904845 20091009
- International Application: PCT/EP2010/064741 WO 20101004
- International Announcement: WO2011/042388 WO 20110414
- Main IPC: H03H3/08
- IPC: H03H3/08 ; H03H3/02 ; H03H3/007

Abstract:
An acoustic wave device comprising at least one surface acoustic wave filter and one bulk acoustic wave filter, the device including, on a substrate comprising a second piezoelectric material: a stack of layers including a first metal layer and a layer of a first monocrystalline piezoelectric material, wherein the stack of layers is partially etched so as to define a first area in which the first and second piezoelectric materials are present and a second area in which the first piezoelectric material is absent; a second metallization at the first area for defining the bulk acoustic wave filter integrating the first piezoelectric material, and a third metallization at the second area for defining the surface acoustic wave filter integrating the second piezoelectric material.
Public/Granted literature
- US20120206216A1 ACOUSTIC WAVE DEVICE INCLUDING A SURFACE WAVE FILTER AND A BULK WAVE FILTER, AND METHOD FOR MAKING SAME Public/Granted day:2012-08-16
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