Invention Grant
US09108120B2 Method for cooling and dispersing a carrier gas, and method for vaporizing a carrier gas
有权
用于冷却和分散载气的方法,以及使载气气化的方法
- Patent Title: Method for cooling and dispersing a carrier gas, and method for vaporizing a carrier gas
- Patent Title (中): 用于冷却和分散载气的方法,以及使载气气化的方法
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Application No.: US14520457Application Date: 2014-10-22
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Publication No.: US09108120B2Publication Date: 2015-08-18
- Inventor: Masayuki Toda , Masaru Umeda
- Applicant: WACOM R&D Corporation
- Applicant Address: JP Tokyo JP Fukushima
- Assignee: WACOM R&D CORPORATION,Masayuki Toda
- Current Assignee: WACOM R&D CORPORATION,Masayuki Toda
- Current Assignee Address: JP Tokyo JP Fukushima
- Agency: Young & Thompson
- Priority: JP2009-023063 20090203
- Main IPC: A01G13/06
- IPC: A01G13/06 ; A61M16/00 ; C23C16/448 ; B01B1/00

Abstract:
Provided is a vaporizer that can efficiently cool a carrier gas, improve the effect of preventing a material from being clogged near the outlet port of a gas passage, contribute to prolonging the timing of maintenance and improving operating efficiency, and exert more uniform dispersing effect. A vaporizer includes: a center rod inserted into a carrier gas introduction hole formed in a disperser to form the gas passage in cooperation with the inner wall of the carrier gas introduction hole; a cooling part disposed on the outer circumferential side of the carrier gas introduction hole in the disperser to cool the inside of the gas passage; a cooling member insertion hole formed across almost the entire length of the center rod along the axial direction of the center rod; and a cooling member disposed in the inside of the cooling member insertion hole to cool the center rod.
Public/Granted literature
- US20150069642A1 METHOD FOR COOLING AND DISPERSING A CARRIER GAS, AND METHOD FOR VAPORIZING A CARRIER GAS Public/Granted day:2015-03-12
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