Invention Grant
- Patent Title: Solid source container with inlet plenum
- Patent Title (中): 固体源容器带入口通风
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Application No.: US11867171Application Date: 2007-10-04
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Publication No.: US09109287B2Publication Date: 2015-08-18
- Inventor: Charles Michael Birtcher , Thomas Andrew Steidl
- Applicant: Charles Michael Birtcher , Thomas Andrew Steidl
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Rosaleen P. Morris-Oskanian
- Main IPC: C23C16/448
- IPC: C23C16/448

Abstract:
A vessel for conveying a precursor fluid from the vessel, comprising: an interior volume having an upper volume and a lower volume, wherein the two volumes are in communication and the lower volume contains precursor; a lid comprising a fluid inlet directing carrier gas into the vessel, a “T” fluid outlet, a sidewall having an upper lip wherein the upper lip contacts the lid; a separator interposed between the lid and the sidewall wherein the separator resides adjacent the upper lip and segments the interior volume into the upper volume and a lower volume; and an inlet plenum in communication with the fluid inlet having a plenum chamber opening towards the separator to direct the carrier gas through the separator and towards the precursor. A method for using the apparatus is also disclosed.
Public/Granted literature
- US20080092816A1 Solid Source Container With Inlet Plenum Public/Granted day:2008-04-24
Information query
IPC分类: