发明授权
- 专利标题: Capacitive pressure sensing semiconductor device
- 专利标题(中): 电容式压力感测半导体器件
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申请号: US14462382申请日: 2014-08-18
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公开(公告)号: US09117933B2公开(公告)日: 2015-08-25
- 发明人: Toshihiko Horie , Hidetaka Takiguchi
- 申请人: Wacom Co., Ltd.
- 申请人地址: JP Saitama
- 专利权人: Wacom Co., Ltd.
- 当前专利权人: Wacom Co., Ltd.
- 当前专利权人地址: JP Saitama
- 代理机构: Seed IP Law Group PLLC
- 优先权: JP2012-015254 20120127
- 主分类号: H01L29/84
- IPC分类号: H01L29/84 ; G01L9/12 ; G01L9/14 ; G01L9/00 ; G01L1/14
摘要:
A capacitive pressure sensing semiconductor device is provided, which has pressure resistance against pressure applied by a pressing member and can detect the pressure surely and efficiently. The pressure sensing semiconductor device includes a pressure detecting part, which detects pressure as a change in capacitance, and a package that receives the pressure detecting part within. The pressure detecting part includes a first electrode and a second electrode disposed to oppose the first electrode, with a determined distance therebetween. Capacitance is formed between the first electrode and the second electrode, and changes according to a change in said distance caused by pressure transmitted to the first electrode by a pressing member. The package also includes a pressure transmitting member that transmits, to the first electrode of the pressure detecting part, the pressure applied by the pressing member.
公开/授权文献
- US20140353778A1 CAPACITIVE PRESSURE SENSING SEMICONDUCTOR DEVICE 公开/授权日:2014-12-04
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