发明授权
- 专利标题： Dielectric layer for electrostatic chuck and electrostatic chuck
- 专利标题（中）： 用于静电吸盘和静电吸盘的介电层
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申请号： US14054417申请日： 2013-10-15
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公开(公告)号： US09120704B2公开(公告)日： 2015-09-01
- 发明人: Kouta Tsutsumi , Mitsuyoshi Nagano , Koki Tamagawa , Norio Shiraiwa , Tadayoshi Yoshikawa , Miki Saito , Toshio Uehara , Hideaki Matsubara , Tetsushi Matsuda
- 申请人： Nippon Tungsten Co., Ltd. , Shinko Electric Industries Co., Ltd. , Trek Holding Co., Ltd. , Japan Fine Ceramics Center
- 申请人地址： JP Fukuoka JP Nagano JP Tokyo JP Aichi
- 专利权人： Nippon Tungsten Co., Ltd.,Shinko Electric Industries Co., Ltd.,Trek Holding Co., Ltd.,Japan Fine Ceramics Center
- 当前专利权人： Nippon Tungsten Co., Ltd.,Shinko Electric Industries Co., Ltd.,Trek Holding Co., Ltd.,Japan Fine Ceramics Center
- 当前专利权人地址： JP Fukuoka JP Nagano JP Tokyo JP Aichi
- 代理机构： Fish Stewart Yamaguchi PLLC
- 优先权： JP2012-228239 20121015
- 主分类号： H01L21/68
- IPC分类号： H01L21/68 ; C04B35/10 ; H01L21/683 ; C04B35/117 ; C04B35/645
摘要：
A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 108 to 1013 (Ω·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.
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