发明授权
- 专利标题： Surface treatments for alignment of block copolymers
- 专利标题（中）： 用于嵌段共聚物取向的表面处理
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申请号： US13583518申请日： 2011-03-17
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公开(公告)号： US09120947B2公开(公告)日： 2015-09-01
- 发明人: C. Grant Willson , Christopher M. Bates , Jeffrey Strahan , Christopher John Ellison
- 申请人： C. Grant Willson , Christopher M. Bates , Jeffrey Strahan , Christopher John Ellison
- 申请人地址： US TX Austin
- 专利权人： BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
- 当前专利权人： BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
- 当前专利权人地址： US TX Austin
- 代理机构： Medlen & Carroll, LLP
- 国际申请： PCT/US2011/028858 WO 20110317
- 国际公布： WO2011/116217 WO 20110922
- 主分类号： B05D3/12
- IPC分类号： B05D3/12 ; C09D153/00 ; B81C1/00 ; G03F7/00 ; G03F7/26 ; B05D1/00
摘要：
The present invention relates to a method the synthesis and utilization of random, cross-linked, substituted polystyrene copolymers as polymeric cross-linked surface treatments (PXSTs) to control the orientation of physical features of a block copolymer deposited over the first copolymer. Such methods have many uses including multiple applications in the semiconductor industry including production of templates for nanoimprint lithography.
公开/授权文献
- US20130045361A1 SURFACE TREATMENTS FOR ALIGNMENT OF BLOCK COPOLYMERS 公开/授权日：2013-02-21
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