发明授权
- 专利标题: Method and system for improving precision of element measurement based on laser-induced breakdown spectroscopy
- 专利标题(中): 基于激光诱导击穿光谱法提高元件测量精度的方法和系统
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申请号: US14000356申请日: 2011-08-30
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公开(公告)号: US09121756B2公开(公告)日: 2015-09-01
- 发明人: Zhe Wang , Zheng Li , Tingbi Yuan , Zongyu Hou , Lizhi Li , Jie Feng
- 申请人: Zhe Wang , Zheng Li , Tingbi Yuan , Zongyu Hou , Lizhi Li , Jie Feng
- 申请人地址: CN Beijing
- 专利权人: TSINGHUA UNIVERSITY
- 当前专利权人: TSINGHUA UNIVERSITY
- 当前专利权人地址: CN Beijing
- 代理机构: Lowe Hauptman & Ham, LLP
- 优先权: CN201110040537 20110218; CN201110210361 20110726
- 国际申请: PCT/CN2011/079129 WO 20110830
- 国际公布: WO2012/109892 WO 20120823
- 主分类号: G01N1/00
- IPC分类号: G01N1/00 ; G01J3/02 ; G01N21/71 ; G01J3/44 ; G01N1/28 ; G01N21/27
摘要:
The present invention provides a method and a system for improving the precision of element measurement based on laser-induced breakdown spectroscopy. The method comprises: press-forming a sample to be measured with a tablet press; making a cavity on or immediately above a surface of the press formed sample; forming a layer of aerosol immediately above the surface of the sample to be measured with the components thereof completely identical to those of the sample to be measured; testing the sample to be measured by using a laser-induced breakdown spectroscopic system, so as to obtain the intensities of the characteristic spectral lines of a target element in the sample to be measured; and determining the concentration of the target element in the sample to be measured according to a calibration curve of the target element in prearranged calibration samples.
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