Invention Grant
US09121896B2 Device for detecting the thinning down of the substrate of an integrated circuit chip 有权
用于检测集成电路芯片的衬底的减薄的装置

Device for detecting the thinning down of the substrate of an integrated circuit chip
Abstract:
A device for detecting the thinning down of the substrate of an integrated circuit chip, including, in the active area of the substrate, bar-shaped diffused resistors connected as a Wheatstone bridge, wherein: first opposite resistors of the bridge are oriented along a first direction; the second opposite resistors of the bridge are oriented along a second direction; and the first and second directions are such that a thinning down of the substrate causes a variation of the imbalance value of the bridge.
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