Invention Grant
- Patent Title: Display substrate and method of measuring pattern dimensions of display substrate
- Patent Title (中): 显示基板和测量显示基板的图形尺寸的方法
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Application No.: US13834858Application Date: 2013-03-15
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Publication No.: US09123276B2Publication Date: 2015-09-01
- Inventor: Yong Jun Park , HyungJun Kim , Young Suk Lee , Jongsoo Lee
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2012-0138073 20121130
- Main IPC: G01B11/14
- IPC: G01B11/14 ; G09G3/00 ; G03F7/20

Abstract:
A display panel includes a plurality of pixel areas and at least one inspection area. An incident light is irradiated onto an inspection pattern disposed in the inspection area and a reflection light reflected by the inspection pattern is detected. An optical critical dimension of the inspection pattern is calculated from the reflection light, and a dimension of a pixel pattern disposed in each pixel area is calculated from the optical critical dimension of the inspection pattern. Accordingly, the dimension of the pixel pattern may be indirectly measured from the inspection pattern.
Public/Granted literature
- US20140153002A1 DISPLAY SUBSTRATE AND METHOD OF MEASURING PATTERN DIMENSIONS OF DISPLAY SUBSTRATE Public/Granted day:2014-06-05
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