Invention Grant
- Patent Title: Flexural plate wave device for chip cooling
- Patent Title (中): 用于芯片冷却的弯曲板波装置
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Application No.: US13173456Application Date: 2011-06-30
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Publication No.: US09123698B2Publication Date: 2015-09-01
- Inventor: Milind S. Bhagavat , Seyed Mahdi Saeidi , Tak Sang Yeung
- Applicant: Milind S. Bhagavat , Seyed Mahdi Saeidi , Tak Sang Yeung
- Applicant Address: US CA Irvine
- Assignee: Broadcom Corporation
- Current Assignee: Broadcom Corporation
- Current Assignee Address: US CA Irvine
- Agency: Fiala & Weaver P.L.L.C.
- Main IPC: H01L23/34
- IPC: H01L23/34 ; H01L23/467 ; H05K7/20

Abstract:
Methods, systems, and apparatuses are described for cooling electronic devices. The electrical device includes an integrated circuit die (IC) having opposing first and second surfaces, a plurality of interconnects on the second surface of the IC die that enable the IC die to be coupled to a substrate, and a flexural plate wave device. The flexural plate wave device is configured to generate a stream of air to flow across the electrical device to cool the IC die during operation of the IC die.
Public/Granted literature
- US20120050989A1 FLEXURAL PLATE WAVE DEVICE FOR CHIP COOLING Public/Granted day:2012-03-01
Information query
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