Invention Grant
US09123698B2 Flexural plate wave device for chip cooling 有权
用于芯片冷却的弯曲板波装置

Flexural plate wave device for chip cooling
Abstract:
Methods, systems, and apparatuses are described for cooling electronic devices. The electrical device includes an integrated circuit die (IC) having opposing first and second surfaces, a plurality of interconnects on the second surface of the IC die that enable the IC die to be coupled to a substrate, and a flexural plate wave device. The flexural plate wave device is configured to generate a stream of air to flow across the electrical device to cool the IC die during operation of the IC die.
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