Invention Grant
US09123726B2 Selective local metal cap layer formation for improved electromigration behavior
有权
选择性局部金属盖层形成,以改善电迁移行为
- Patent Title: Selective local metal cap layer formation for improved electromigration behavior
- Patent Title (中): 选择性局部金属盖层形成,以改善电迁移行为
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Application No.: US13964772Application Date: 2013-08-12
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Publication No.: US09123726B2Publication Date: 2015-09-01
- Inventor: Ronald G. Filippi , Erdem Kaltalioglu , Ping-Chuan Wang , Lijuan Zhang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Catherine Ivers
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L21/44 ; H01L23/532 ; H01L23/522 ; H01L21/768

Abstract:
A method of forming a wiring structure for an integrated circuit device includes forming a first metal line within an interlevel dielectric (ILD) layer, and forming a second metal line in the ILD layer adjacent the first metal line; masking selected regions of the first and second metal lines; selectively plating metal cap regions over exposed regions of the first and second metal lines at periodic intervals such that a spacing between adjacent metal cap regions of an individual metal line corresponds to a critical length, L, at which a back stress gradient balances an electromigration force in the individual metal line, so as to suppress mass transport of electrons; and wherein the metal cap regions of the first metal line are formed at staggered locations with respect to the metal cap regions of the second metal line, along a common longitudinal axis.
Public/Granted literature
- US20140203436A1 SELECTIVE LOCAL METAL CAP LAYER FORMATION FOR IMPROVED ELECTROMIGRATION BEHAVIOR Public/Granted day:2014-07-24
Information query
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