发明授权
- 专利标题: Method of checking an inspection apparatus and method of establishing a measurement variable of the inspection apparatus
- 专利标题(中): 检查装置的检查方法以及建立检查装置的测量变量的方法
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申请号: US13084949申请日: 2011-04-12
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公开(公告)号: US09124810B2公开(公告)日: 2015-09-01
- 发明人: Hee-Wook You
- 申请人: Hee-Wook You
- 申请人地址: KR Seoul
- 专利权人: KOH YOUNG TECHNOLOGY INC.
- 当前专利权人: KOH YOUNG TECHNOLOGY INC.
- 当前专利权人地址: KR Seoul
- 代理机构: Kile Park Reed & Houtteman PLLC
- 优先权: KR10-2010-0034056 20100414; KR10-2011-0023171 20110316; KR10-2011-0032487 20110408
- 主分类号: H04N7/18
- IPC分类号: H04N7/18 ; H04N5/235 ; G01N21/88 ; G01N21/956 ; H04N13/02
摘要:
In order to establish a lighting intensity of an inspection apparatus, an inspection board is installed in an inspection apparatus. Then, a width of a histogram of a captured image acquired through a camera of the inspection apparatus is adjusted to avoid from a dark region and a bright region. Thereafter, a lighting intensity of the inspection apparatus is adjusted by adjusting the histogram to be near a middle of a graph. Thus, a setting time of an inspection condition stored in a job file may be reduced to increase the user's convenience, and measurement error due to mis-establishment may be reduced to enhance inspection precision.
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