发明授权
- 专利标题: Method for cleaning bell jar, method for producing polycrystalline silicon, and apparatus for drying bell jar
- 专利标题(中): 钟罩的清洗方法,多晶硅的制造方法以及钟罩的干燥装置
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申请号: US13704767申请日: 2011-03-07
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公开(公告)号: US09126242B2公开(公告)日: 2015-09-08
- 发明人: Yasushi Kurosawa , Kyoji Oguro , Shinichi Kurotani , Shigeyoshi Netsu
- 申请人: Yasushi Kurosawa , Kyoji Oguro , Shinichi Kurotani , Shigeyoshi Netsu
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2010-137646 20100616
- 国际申请: PCT/JP2011/001319 WO 20110307
- 国际公布: WO2011/158404 WO 20111222
- 主分类号: C01B33/035
- IPC分类号: C01B33/035 ; B08B3/04 ; B08B9/08 ; B08B3/10 ; F28G13/00 ; F26B5/12
摘要:
A bell jar includes a metallic bell jar (1), and a metallic base plate (2) on which the bell jar (1) is placed, and packing (3) seals an inside of a container. To the base plate (2), a pressure gauge (4), a gas introduction line (5), and a gas discharge line (6) are connected so as to allow monitoring of internal pressure of the bell jar (1) and introduction and discharge of a gas. A vacuum pump (7) is provided in a path of the gas discharge line (6), and the vacuum pump (7) reduces internal pressure of the bell jar so as to be lower than vapor pressure of water. The vacuum pump (7) reduces the internal pressure of the bell jar so as to be lower than vapor pressure of water, thereby efficiently removing moisture, and completing drying of the bell jar in a short time.