发明授权
- 专利标题: Electrical component and method of manufacturing the same
- 专利标题(中): 电气元件及其制造方法
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申请号: US13962885申请日: 2013-08-08
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公开(公告)号: US09126824B2公开(公告)日: 2015-09-08
- 发明人: Tomohiro Saito
- 申请人: KABUSHIKI KAISHA TOSHIBA
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 代理机构: Holtz, Holtz, Goodman & Chick PC
- 优先权: JP2013-027926 20130215
- 主分类号: H01L29/84
- IPC分类号: H01L29/84 ; B81B7/00 ; B81C1/00
摘要:
According to one embodiment, an electrical component comprises a substrate, a functional element formed on the substrate, a first layer configured to form a cavity which stores the functional element on the substrate, the first layer having through holes, the first layer having a first recessed portion and a first projecting portion on an upper surface thereof, and the first layer having different film thicknesses in a direction perpendicular to a surface of the substrate, and a second layer formed on the first layer and configured to close the through holes.
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