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US09129886B2 Integrated piezoelectric resonator and additional active circuit 有权
集成压电谐振器和附加有源电路

Integrated piezoelectric resonator and additional active circuit
Abstract:
A semiconductor device comprises a semiconductor wafer; a piezoelectric resonator formed on the wafer, and an active circuit also formed on the wafer. The active circuit (e.g., a frequency divider) is electrically connected to the piezoelectric resonator.
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