Invention Grant
- Patent Title: Detector apparatus having a cooling component
- Patent Title (中): 具有冷却部件的检测器装置
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Application No.: US13585991Application Date: 2012-08-15
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Publication No.: US09130079B2Publication Date: 2015-09-08
- Inventor: Frank Schreiber , Bernd Widzgowski , Holger Birk
- Applicant: Frank Schreiber , Bernd Widzgowski , Holger Birk
- Applicant Address: DE Wetzlar
- Assignee: LEICA MICROSYSTEMS CMS GMBH
- Current Assignee: LEICA MICROSYSTEMS CMS GMBH
- Current Assignee Address: DE Wetzlar
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: DE102011052738 20110816; DE102012101675 20120229
- Main IPC: H01L31/024
- IPC: H01L31/024 ; H01J40/02 ; H01J40/16 ; H01J43/02 ; H01J43/28
Abstract:
A detector apparatus is configured to receive light and generate electrical signals. The detector apparatus includes a light sensor having a light incidence side and a cooling component. The cooling component is in direct contact with at least one of the light sensor, on the light incidence side, or a substrate carrying the light sensor.
Public/Granted literature
- US20130043377A1 DETECTOR APPARATUS Public/Granted day:2013-02-21
Information query
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