Invention Grant
- Patent Title: Forming alignment mark and resulting mark
- Patent Title (中): 形成对准标记和结果标记
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Application No.: US13952231Application Date: 2013-07-26
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Publication No.: US09136223B2Publication Date: 2015-09-15
- Inventor: Guoxiang Ning , Soon Yoeng Tan , Seok Yan Poh , Paul Ackmann
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L23/544 ; G03F7/20 ; G03F1/42 ; G03F9/00
Abstract:
Methods for forming an alignment mark and the resulting mark are disclosed. Embodiments may include forming a first shape having rotational symmetry; forming a second shape; and forming an alignment mark by combining the first shape and one or more of the second shape, wherein the alignment mark has rotational symmetry.
Public/Granted literature
- US20150028500A1 FORMING ALIGNMENT MARK AND RESULTING MARK Public/Granted day:2015-01-29
Information query
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