Invention Grant
- Patent Title: Transistor with coupled gate and ground plane
- Patent Title (中): 具有耦合栅极和接地层的晶体管
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Application No.: US14156559Application Date: 2014-01-16
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Publication No.: US09136366B2Publication Date: 2015-09-15
- Inventor: Bastien Giraud , Jean-Philippe Noel , Maud Vinet
- Applicant: Commissariat a l'energie atomique et aux energies alternatives , STMicroelectronics SA
- Applicant Address: FR Paris FR Mountrouge
- Assignee: Commissariat a l'energie atomique et aux energies alternatives,STMicroelectronics SA
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives,STMicroelectronics SA
- Current Assignee Address: FR Paris FR Mountrouge
- Agency: Occhiuti & Rohlicek LLP
- Priority: FR1350381 20130116
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/423 ; H01L29/772 ; H01L29/786

Abstract:
An integrated circuit includes a silicon substrate, a ground plane above the substrate, a buried insulator layer above the ground plane, a silicon layer above the buried insulator layer and separated from the ground plane by the buried insulator layer, and an FDSOI transistor. The transistor has a channel adapted for being formed in the silicon layer, a source and drain in and/or on the silicon layer, and a gate covering an upper face of the channel and having a lateral portion covering a lateral face of the channel and above the ground plane. A distance between the lateral portion and the ground plane is not more than three nanometers and at least five times less than a thickness of the buried insulator layer between the ground plane and the silicon layer. The ground plane is separated from the gate by the buried insulator layer.
Public/Granted literature
- US20140231916A1 Transistor with coupled gate and ground plane Public/Granted day:2014-08-21
Information query
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