Invention Grant
- Patent Title: Apparatus and method for solution coating thin layers
- Patent Title (中): 溶液涂层薄层的设备和方法
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Application No.: US12992992Application Date: 2009-05-19
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Publication No.: US09138771B2Publication Date: 2015-09-22
- Inventor: Charles D. Lang , Tami Janene Faircloth
- Applicant: Charles D. Lang , Tami Janene Faircloth
- Applicant Address: US DE Wilmington
- Assignee: E I DU PONT DE NEMOURS AND COMPANY
- Current Assignee: E I DU PONT DE NEMOURS AND COMPANY
- Current Assignee Address: US DE Wilmington
- International Application: PCT/US2009/044487 WO 20090519
- International Announcement: WO2009/143132 WO 20091126
- Main IPC: B05D3/12
- IPC: B05D3/12 ; B05C5/02 ; B05D3/04 ; B05B15/02 ; H01L51/00 ; H01L51/56
Abstract:
An apparatus and method for solution coating layers onto a substrate of an electronic device. A slot die coater in conjunction with a vacuum assist device is used in priming, coating and cleaning stations to produce thin layers having performance advantages over competing technologies.
Public/Granted literature
- US20110086164A1 APPARATUS AND METHOD FOR SOLUTION COATING THIN LAYERS Public/Granted day:2011-04-14
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