Invention Grant
US09139898B2 Method and system for manufacturing a target for the emission of photon radiation, particularly X rays, or of particles, particularly protons or electrons, by laser firing
有权
通过激光烧制制造用于发射光子辐射,特别是X射线或粒子,特别是质子或电子的靶的方法和系统
- Patent Title: Method and system for manufacturing a target for the emission of photon radiation, particularly X rays, or of particles, particularly protons or electrons, by laser firing
- Patent Title (中): 通过激光烧制制造用于发射光子辐射,特别是X射线或粒子,特别是质子或电子的靶的方法和系统
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Application No.: US14187685Application Date: 2014-02-24
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Publication No.: US09139898B2Publication Date: 2015-09-22
- Inventor: Jean-Paul Perin
- Applicant: Commissariat A L'Energie Atomique Et Aux Energies Alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat A L'Energie Atomique Et Aux Energies Alternatives
- Current Assignee: Commissariat A L'Energie Atomique Et Aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Burr & Brown, PLLC
- Priority: FR13.52501 20130320
- Main IPC: C23C14/22
- IPC: C23C14/22 ; H05G2/00 ; C23C14/04 ; C23C14/14 ; C23C14/50 ; C23C14/54 ; H01J35/08

Abstract:
A method of manufacturing a target for the generation of radiation of photons, protons or electrons by means of a laser, including: forming a support including first and second surfaces connected by openings, and forming in an enclosure a layer of material on the first surface by protecting the first surface with a protection element, injecting into the enclosure a gas of filling material, adjusting the pressure in the enclosure and the temperature of the support to form plugs of material in the openings of the support, and maintaining the temperature of the support and the pressure in the enclosure at values to maintain the plugs, followed by withdrawing the protection element from the first surface, and forming a layer of metallic material on the first surface of the support and on the plugs. The pressure and support temperature are then modified to remove the plugs.
Public/Granted literature
Information query
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