Invention Grant
US09142644B2 Semiconductor device and method for fabricating the same 有权
半导体装置及其制造方法

Semiconductor device and method for fabricating the same
Abstract:
The present inventive concept has been made in an effort to increase the width of a channel in a silicon carbide MOSFET using a trench gate.According to the exemplary embodiment of the present inventive concept, the width of a channel can be increased, compared with the conventional art, by forming a plurality of protrusions extending to the p type epitaxial layer on both sides of the trench.
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