发明授权
US09142674B2 FINFET devices having a body contact and methods of forming the same
有权
具有身体接触的FINFET装置及其形成方法
- 专利标题: FINFET devices having a body contact and methods of forming the same
- 专利标题(中): 具有身体接触的FINFET装置及其形成方法
-
申请号: US14176767申请日: 2014-02-10
-
公开(公告)号: US09142674B2公开(公告)日: 2015-09-22
- 发明人: Yanxiang Liu , Michael Hargrove , Christian Gruensfelder
- 申请人: GLOBALFOUNDRIES, Inc.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES, INC.
- 当前专利权人: GLOBALFOUNDRIES, INC.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Ingrassia Fisher & Lorenz, P.C.
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/66
摘要:
Fin field-effect transistor devices and methods of forming the fin field-effect transistor devices are provided herein. In an embodiment, a fin field-effect transistor device includes a semiconductor substrate that has a fin. A gate electrode structure overlies the fin. Source and drain halo and/or extension regions and epitaxially-grown source regions and drain regions are formed in the fin and are disposed adjacent to the gate electrode structure. A body contact is disposed on a contact surface of the fin, and the body contact is spaced separately from the halo and/or extension regions and the epitaxially-grown source regions and drain regions.
公开/授权文献
信息查询
IPC分类: