Invention Grant
US09142674B2 FINFET devices having a body contact and methods of forming the same
有权
具有身体接触的FINFET装置及其形成方法
- Patent Title: FINFET devices having a body contact and methods of forming the same
- Patent Title (中): 具有身体接触的FINFET装置及其形成方法
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Application No.: US14176767Application Date: 2014-02-10
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Publication No.: US09142674B2Publication Date: 2015-09-22
- Inventor: Yanxiang Liu , Michael Hargrove , Christian Gruensfelder
- Applicant: GLOBALFOUNDRIES, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66

Abstract:
Fin field-effect transistor devices and methods of forming the fin field-effect transistor devices are provided herein. In an embodiment, a fin field-effect transistor device includes a semiconductor substrate that has a fin. A gate electrode structure overlies the fin. Source and drain halo and/or extension regions and epitaxially-grown source regions and drain regions are formed in the fin and are disposed adjacent to the gate electrode structure. A body contact is disposed on a contact surface of the fin, and the body contact is spaced separately from the halo and/or extension regions and the epitaxially-grown source regions and drain regions.
Public/Granted literature
- US20140264633A1 FINFET DEVICES HAVING A BODY CONTACT AND METHODS OF FORMING THE SAME Public/Granted day:2014-09-18
Information query
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