Invention Grant
- Patent Title: Resistive random access memory and method for fabricating the same
- Patent Title (中): 电阻随机存取存储器及其制造方法
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Application No.: US13723009Application Date: 2012-12-20
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Publication No.: US09142776B2Publication Date: 2015-09-22
- Inventor: Heng-Yuan Lee , Pang-Shiu Chen , Tai-Yuan Wu , Ching-Chiun Wang
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Priority: TW97130654A 20080812
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
A resistive random access memory and a method for fabricating the same are provided. The method includes forming a bottom electrode on a substrate; forming a metal oxide layer on the bottom electrode; forming an oxygen atom gettering layer on the metal oxide layer; forming a first top electrode sub-layer on the oxygen atom gettering layer; forming a second top electrode sub-layer on the first top electrode sub-layer, wherein the first top electrode sub-layer and the second top electrode sub-layer comprise a top electrode; and subjecting the metal oxide layer and the oxygen atom gettering layer to a thermal treatment, driving the oxygen atoms of the metal oxide layer to migrate into and react with the oxygen atom gettering layer, resulting in a plurality of oxygen vacancies within the metal oxide layer.
Public/Granted literature
- US20130119343A1 RESISTIVE RANDOM ACCESS MEMORY AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-05-16
Information query
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