Invention Grant
- Patent Title: High vacuum OLED deposition source and system
- Patent Title (中): 高真空OLED沉积源和系统
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Application No.: US14081161Application Date: 2013-11-15
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Publication No.: US09142778B2Publication Date: 2015-09-22
- Inventor: William E. Quinn , Siddharth Harikrishna Mohan , Gregory McGraw
- Applicant: Universal Display Corporation
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- Agency: Morris & Kamlay LLP
- Main IPC: H01L51/40
- IPC: H01L51/40 ; H01L51/00 ; C23C14/04 ; C23C14/12 ; H01L51/56

Abstract:
Sources, devices, and techniques for deposition of organic layers, such as for use in an OLED, are provided. A vaporizer may vaporize a material between cooled side walls and toward a mask having an adjustable mask opening. The mask opening may be adjusted to control the pattern of deposition of the material on a substrate, such as to correct for material buildup that occurs during deposition. Material may be collected from the cooled side walls for reuse.
Public/Granted literature
- US20150140832A1 HIGH VACUUM OLED DEPOSITION SOURCE AND SYSTEM Public/Granted day:2015-05-21
Information query
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