发明授权
US09142857B2 Apparatus for harvesting and storing piezoelectric energy and manufacturing method thereof 有权
用于收集和存储压电能的装置及其制造方法

Apparatus for harvesting and storing piezoelectric energy and manufacturing method thereof
摘要:
Disclosed are an apparatus for harvesting/storing piezoelectric energy, including: a substrate having a groove at a side thereon; a piezoelectric MEMS cantilever having an end fixed to the substrate and the other end floating above the groove, and configured to convert and store an external vibration into electric energy; and a mass formed at one end of the piezoelectric MEMS cantilever and configured to apply a vibration, and a manufacturing method thereof.
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