Invention Grant
- Patent Title: Integrated circuits having replacement metal gates with improved threshold voltage performance and methods for fabricating the same
- Patent Title (中): 具有具有改进的阈值电压性能的替换金属栅极的集成电路及其制造方法
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Application No.: US13943944Application Date: 2013-07-17
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Publication No.: US09147680B2Publication Date: 2015-09-29
- Inventor: Kristina Trevino , Yuan-Hung Lin , Gabriel Padron Wells , Chang Ho Maeng , Taejoon Han , Hoong Shing Wong
- Applicant: GLOBALFOUNDRIES, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/28

Abstract:
Integrated circuits having replacement metal gates with improved threshold voltage performance and methods for fabricating such integrated circuits are provided. A method includes providing a dielectric layer overlying a semiconductor substrate. The dielectric layer has a first and a second trench. A gate dielectric layer is formed in the first and second trench. A first barrier layer is formed overlying the gate dielectric layer. A work function material layer is formed within the trenches. The work function material layer and the first barrier layer are recessed in the first and second trench. The work function material layer and the first barrier layer form a beveled surface. The gate dielectric layer is recessed in the first and second trench. A conductive gate electrode material is deposited such that it fills the first and second trench. The conductive gate electrode material is recessed in the first and second trench.
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