Invention Grant
- Patent Title: Femtosecond laser processing system with process parameters controls and feedback
- Patent Title (中): 飞秒激光加工系统具有过程参数控制和反馈
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Application No.: US14100912Application Date: 2013-12-09
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Publication No.: US09147989B2Publication Date: 2015-09-29
- Inventor: Lawrence Shah , James M. Bovatsek , Alan Y. Arai , Tadashi Yamamoto , Rajesh S. Patel , Donald J. Harter
- Applicant: IMRA AMERICA, INC.
- Applicant Address: US MI Ann Arbor
- Assignee: IMRA AMERICA, INC.
- Current Assignee: IMRA AMERICA, INC.
- Current Assignee Address: US MI Ann Arbor
- Agency: Sughrue Mion, PLLC
- Agent Richard C. Turner
- Main IPC: H01S3/30
- IPC: H01S3/30 ; H01S3/00 ; G01J11/00 ; H01S3/102 ; H01S3/067 ; H01S3/109 ; H01S3/13 ; H01S3/16
Abstract:
A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.
Public/Granted literature
- US20140092927A1 FEMTOSECOND LASER PROCESSING SYSTEM WITH PROCESS PARAMETERS CONTROLS AND FEEDBACK Public/Granted day:2014-04-03
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