发明授权
- 专利标题: Combined sensor
- 专利标题(中): 组合传感器
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申请号: US13983828申请日: 2012-01-10
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公开(公告)号: US09151776B2公开(公告)日: 2015-10-06
- 发明人: Heewon Jeong , Masahide Hayashi
- 申请人: Heewon Jeong , Masahide Hayashi
- 申请人地址: JP Hitachinaka-shi
- 专利权人: Hitachi Automotive Systems, Ltd.
- 当前专利权人: Hitachi Automotive Systems, Ltd.
- 当前专利权人地址: JP Hitachinaka-shi
- 代理机构: Crowell & Moring LLP
- 优先权: JP2011-030790 20110216
- 国际申请: PCT/JP2012/050214 WO 20120110
- 国际公布: WO2012/111357 WO 20120823
- 主分类号: G01C19/5719
- IPC分类号: G01C19/5719 ; G01P15/125 ; G01P15/08 ; G01C19/5733 ; G01C19/5726 ; H01L29/84 ; G01C19/5769
摘要:
An object of the invention is to provide a combined sensor capable of suppressing the influence of electrostatic force generated by a potential difference and preventing a reduction in the S/N ratio or a variation in the sensitivity of a sensor.A combined sensor according to the invention includes first and second movable portions and first and second dummy portions provided around the first and second movable portions, which are formed in a layer of a laminated substrate. The first dummy portion and the second dummy portion are electrically separated from each other. A first potential is applied to the first movable portion and the first dummy portion and a second potential is applied to the second movable portion and the second dummy portion (see FIG. 2).
公开/授权文献
- US20130312517A1 Combined Sensor 公开/授权日:2013-11-28
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