发明授权
US09153394B2 Method for fabricating a microswitch actuatable by a magnetic field
有权
用于制造可由磁场致动的微动开关的方法
- 专利标题: Method for fabricating a microswitch actuatable by a magnetic field
- 专利标题(中): 用于制造可由磁场致动的微动开关的方法
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申请号: US13340785申请日: 2011-12-30
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公开(公告)号: US09153394B2公开(公告)日: 2015-10-06
- 发明人: Henri Sibuet , Yannick Vuillermet
- 申请人: Henri Sibuet , Yannick Vuillermet
- 申请人地址: FR Paris
- 专利权人: Commissariat a l'energie atomique et aux energies alternatives
- 当前专利权人: Commissariat a l'energie atomique et aux energies alternatives
- 当前专利权人地址: FR Paris
- 代理机构: Occhiuti & Rohlicek LLP
- 优先权: FR1150027 20110103
- 主分类号: H01H11/00
- IPC分类号: H01H11/00 ; H01H1/66 ; H01H36/00 ; H01H1/00
摘要:
The invention concerns a method for the fabrication, on a plane substrate, of a microswitch actuatable by a magnetic field, comprising:a) the etching, in the upper face of the plane substrate, of cavities forming a hollow model of two strips, these cavities having vertical flanks extending perpendicularly to the plane of the substrate to form vertical faces of the strips,b) the filling of the cavities by a magnetic material to form the strips, thenc) the etching in the substrate, by a method of isotropic etching, of a well that extends between the vertical faces of the strips and beneath and around one distal end of at least one of the strips to open out an air gap between these strips and make this distal end capable of being shifted between a closed position and an open position.
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