发明授权
US09153677B2 Insulated gate bipolar transistor with high emitter gate capacitance
有权
具有高发射极栅极电容的绝缘栅双极晶体管
- 专利标题: Insulated gate bipolar transistor with high emitter gate capacitance
- 专利标题(中): 具有高发射极栅极电容的绝缘栅双极晶体管
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申请号: US14514893申请日: 2014-10-15
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公开(公告)号: US09153677B2公开(公告)日: 2015-10-06
- 发明人: Christoph von Arx
- 申请人: ABB Schweiz AG
- 申请人地址: CH Baden
- 专利权人: ABB SCHWEIZ AG
- 当前专利权人: ABB SCHWEIZ AG
- 当前专利权人地址: CH Baden
- 代理机构: Buchanan Ingersoll & Rooney PC
- 优先权: EP12165480 20120425
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/739 ; H01L29/40 ; H01L29/417 ; H01L29/43 ; H01L29/06 ; H01L29/08 ; H01L29/49
摘要:
An IGBT is disclosed with a high emitter-gate capacitance, wherein an active cell region can include plural emitter and gate regions. A termination edge region can include a varied lateral doping region VLD. Each gate polysilicon layer can be arranged at a surface of the semiconductor substrate in the gate regions, separated from the semiconductor substrate by a first insulating layer. A first SIPOS layer and a covering second insulating layer overlie at least portions of the gate polysilicon layer. In a central area, the gate polysilicon layer is in electrical contact with the overlying first SIPOS layer whereas, in a peripheral area, the gate polysilicon layer is electrically separated from the overlying first SIPOS layer. A substrate surface at the VLD region is in electrical contact with a second SIPOS layer, and an increased gate-emitter capacitance may be achieved by slightly modifying etch masks during manufacturing.
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