Invention Grant
US09159805B2 TFT array substrate and a method for manufacturing the same graphene based display device
有权
TFT阵列基板和相同的基于石墨烯的显示装置的制造方法
- Patent Title: TFT array substrate and a method for manufacturing the same graphene based display device
- Patent Title (中): TFT阵列基板和相同的基于石墨烯的显示装置的制造方法
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Application No.: US13704704Application Date: 2012-09-28
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Publication No.: US09159805B2Publication Date: 2015-10-13
- Inventor: Tianming Dai , Jianshe Xue , Qi Yao , Feng Zhang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Ladas & Parry LLP
- Priority: CN201110294074 20110929
- International Application: PCT/CN2012/082245 WO 20120928
- International Announcement: WO2013/044836 WO 20130404
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L29/10 ; H01L29/66 ; H01L27/32 ; H01L29/16 ; H01L29/786 ; H01L27/12 ; G02F1/1368

Abstract:
Embodiments of the present invention provide a thin film transistor (TFT) array substrate and a method for manufacturing the same and a display device. The TFT array substrate improves a structure of a TFT array substrate and has a small thickness, and process flow is simplified. The method for manufacturing a thin film transistor (TFT) array substrate comprises: obtaining a gate line and a gate electrode through a first patterning process on a glass substrate; forming a gate insulating layer on the gate line and the gate electrode; forming a graphene layer on the gate insulating layer, and obtaining a semiconductor active layer over the gate electrode by a second patterning process and a hydrogenation treatment; obtaining a data line, a source electrode, a drain electrode and a pixel electrode which are located on the same layer by a third patterning process; and forming a protection layer on the data line, the source electrode, the semiconductor active layer, the drain electrode and the pixel electrode.
Public/Granted literature
- US20140077160A1 TFT ARRAY SUBSTRATE AND A METHOD FOR MANUFACTURING THE SAME AND DISPLAY DEVICE Public/Granted day:2014-03-20
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