发明授权
- 专利标题: Crystal growth device
- 专利标题(中): 晶体生长装置
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申请号: US13479497申请日: 2012-05-24
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公开(公告)号: US09163326B2公开(公告)日: 2015-10-20
- 发明人: Chung-Wen Lan , Bruce Hsu , Wen-Huai Yu , Wen-Chieh Lan , Yu-Min Yang , Kai-Yuan Pai , Wen-Ching Hsu
- 申请人: Chung-Wen Lan , Bruce Hsu , Wen-Huai Yu , Wen-Chieh Lan , Yu-Min Yang , Kai-Yuan Pai , Wen-Ching Hsu
- 申请人地址: TW Hsinchu
- 专利权人: Sino-American Silicon Products Inc.
- 当前专利权人: Sino-American Silicon Products Inc.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Osha Liang LLP
- 优先权: TW100124589A 20110712
- 主分类号: C30B11/00
- IPC分类号: C30B11/00 ; C30B21/02
摘要:
A crystal growth device includes a crucible and a heater setting. The crucible has a bottom and a top opening. The heater setting surrounds the crucible and is movable relative to the crucible along a top-bottom direction of the crucible and between first and second positions. The heater setting includes a first temperature heating zone and a second temperature heating zone higher in temperature than the first temperature heating zone. The heater setting is in the first position when the crucible is in the second temperature heating zone and in the second position when the crucible is in the first temperature heating zone.
公开/授权文献
- US20130133569A1 Crystal Growth Device 公开/授权日:2013-05-30
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