发明授权
- 专利标题: Thermal detector, thermal detection device, and electronic instrument
- 专利标题(中): 热探测器,热检测装置和电子仪器
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申请号: US13371679申请日: 2012-02-13
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公开(公告)号: US09163993B2公开(公告)日: 2015-10-20
- 发明人: Takafumi Noda
- 申请人: Takafumi Noda
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Global IP Counselors, LLP
- 优先权: JP2011-036672 20110223
- 主分类号: G01J5/02
- IPC分类号: G01J5/02 ; G01J5/00 ; G01J5/08 ; G01J5/20
摘要:
A thermal detector includes a substrate, a support member, a spacer member, a thermal detection element, a detection circuit and a wiring part. The spacer member supports the support member over the substrate with a cavity part being formed therebetween. The thermal detection element is supported on the support member. The wiring part connects between the detection circuit and the thermal detection element, and has first through third conductive layer parts and a plurality of plugs. The first conductive layer part includes at least one layer disposed in the substrate. The second conductive layer part includes at least one layer disposed in the spacer member. The third conductive layer part includes at least one layer supported by the support member. The plugs respectively connect adjacent layers of the first conductive layer part, the second conductive layer part and the third conductive layer part, in a thickness direction of the substrate.
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