Invention Grant
US09164276B2 Micro optical switching device, image display apparatus including micro optical switching device, and method of manufacturing micro optical switching device 有权
微光开关装置,包括微光开关装置的图像显示装置以及微型光开关装置的制造方法

  • Patent Title: Micro optical switching device, image display apparatus including micro optical switching device, and method of manufacturing micro optical switching device
  • Patent Title (中): 微光开关装置,包括微光开关装置的图像显示装置以及微型光开关装置的制造方法
  • Application No.: US13912719
    Application Date: 2013-06-07
  • Publication No.: US09164276B2
    Publication Date: 2015-10-20
  • Inventor: Dong-sik Shim
  • Applicant: SAMSUNG ELECTRONICS CO., LTD.
  • Applicant Address: KR Suwon-si
  • Assignee: SAMSUNG ELECTRONICS CO., LTD.
  • Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
  • Current Assignee Address: KR Suwon-si
  • Agency: Sughrue Mion, PLLC
  • Priority: KR10-2012-0061080 20120607
  • Main IPC: G02B26/02
  • IPC: G02B26/02
Micro optical switching device, image display apparatus including micro optical switching device, and method of manufacturing micro optical switching device
Abstract:
A micro optical switching device is provided, including a substrate, a first electrode disposed on a first surface of the substrate and including a first opening array including having a first plurality of openings, a second electrode disposed over the first electrode and including a second opening array including a plurality of second openings which do not overlap with the plurality of first openings, and a support member disposed on the substrate. The support member has a thickness greater than a distance from the first surface of the substrate to the second electrode and protrudes above the second electrode.
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