发明授权
- 专利标题: Wafer processing sheet
- 专利标题(中): 晶圆加工板
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申请号: US13326103申请日: 2011-12-14
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公开(公告)号: US09165815B2公开(公告)日: 2015-10-20
- 发明人: Se Ra Kim , Hyo Sook Joo , Suk Ky Chang , Jung Sup Shim
- 申请人: Se Ra Kim , Hyo Sook Joo , Suk Ky Chang , Jung Sup Shim
- 申请人地址: KR Seoul
- 专利权人: LG CHEM, LTD.
- 当前专利权人: LG CHEM, LTD.
- 当前专利权人地址: KR Seoul
- 代理机构: Dentons US LLP
- 优先权: KR10-2009-0052948 20090615
- 主分类号: H01L21/762
- IPC分类号: H01L21/762 ; B32B27/40 ; H01L21/683
摘要:
Provided is a sheet for processing a wafer. The sheet can exhibit excellent heat resistance and dimensional stability, prevent breakage of a wafer in response to residual stress due to excellent stress relaxation properties, inhibit damage to or dispersion of the wafer due to application of a non-uniform pressure, and also exhibit excellent cuttability. The sheet can effectively prevent a blocking phenomenon from occurring during wafer processing. For these reasons, the sheet can be useful for processing a wafer in various wafer preparation processes such as dicing, back-grinding and picking-up.
公开/授权文献
- US20120202337A1 WAFER PROCESSING SHEET 公开/授权日:2012-08-09
信息查询
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