Invention Grant
US09165896B2 GaN transistor with improved bonding pad structure and method of fabricating the same
有权
具有改进的焊盘结构的GaN晶体管及其制造方法
- Patent Title: GaN transistor with improved bonding pad structure and method of fabricating the same
- Patent Title (中): 具有改进的焊盘结构的GaN晶体管及其制造方法
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Application No.: US14453969Application Date: 2014-08-07
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Publication No.: US09165896B2Publication Date: 2015-10-20
- Inventor: Hae Cheon Kim , Ho Kyun Ahn , Byoung Gue Min , Hyung Sup Yoon , Jong Won Lim
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2014-0006091 20140117
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L23/00

Abstract:
The present invention relates to a GaN transistor, and a method of fabricating the same, in which a structure of a bonding pad is improved by forming an ohmic metal layer at edges of the bonding pad of a source, a drain, and a gate so as to be appropriate to wire-bonding or a back-side via-hole forming process. Accordingly, adhesive force between a metal layer of the bonding pad and a GaN substrate is enhanced by forming the ohmic metal at the edges of the bonding pad during manufacturing of the GaN transistor, thereby minimizing a separation phenomenon of a pad layer during the wire-bonding or back-side via-hole forming process, and improving reliability of a device.
Public/Granted literature
- US20150206847A1 GaN TRANSISTOR WITH IMPROVED BONDING PAD STRUCTURE AND METHOD OF FABRICATING THE SAME Public/Granted day:2015-07-23
Information query
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