Invention Grant
US09165896B2 GaN transistor with improved bonding pad structure and method of fabricating the same 有权
具有改进的焊盘结构的GaN晶体管及其制造方法

GaN transistor with improved bonding pad structure and method of fabricating the same
Abstract:
The present invention relates to a GaN transistor, and a method of fabricating the same, in which a structure of a bonding pad is improved by forming an ohmic metal layer at edges of the bonding pad of a source, a drain, and a gate so as to be appropriate to wire-bonding or a back-side via-hole forming process. Accordingly, adhesive force between a metal layer of the bonding pad and a GaN substrate is enhanced by forming the ohmic metal at the edges of the bonding pad during manufacturing of the GaN transistor, thereby minimizing a separation phenomenon of a pad layer during the wire-bonding or back-side via-hole forming process, and improving reliability of a device.
Information query
Patent Agency Ranking
0/0