Invention Grant
- Patent Title: Method of manufacturing a magnetoresistive-based device
- Patent Title (中): 制造基于磁阻的装置的方法
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Application No.: US14264520Application Date: 2014-04-29
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Publication No.: US09166155B2Publication Date: 2015-10-20
- Inventor: Sarin A. Deshpande , Sanjeev Aggarwal
- Applicant: Everspin Technologies, Inc.
- Applicant Address: US AZ Chandler
- Assignee: Everspin Technologies, Inc.
- Current Assignee: Everspin Technologies, Inc.
- Current Assignee Address: US AZ Chandler
- Main IPC: B44C1/22
- IPC: B44C1/22 ; H01L43/12 ; G11B5/84

Abstract:
A method of manufacturing a magnetoresistive-based device having magnetic material layers formed between a first electrically conductive layer and a second electrically conductive layer, the magnetic materials layers including a tunnel barrier layer formed between a first magnetic materials layer and a second magnetic materials layer, including removing the first electrically conductive layer and the first magnetic materials layer unprotected by a first hard mask, to form a first electrode and a first magnetic materials, respectively; and removing the tunnel barrier layer, second magnetic materials layer, and second electrically conductive layer unprotected by the second hard mask to form a tunnel barrier, second magnetic materials, and a second electrode.
Public/Granted literature
- US20140315329A1 METHOD OF MANUFACTURING A MAGNETORESISTIVE-BASED DEVICE Public/Granted day:2014-10-23
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