Invention Grant
- Patent Title: Phase change memory cell with large electrode contact area
- Patent Title (中): 具有大电极接触面积的相变存储单元
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Application No.: US14490990Application Date: 2014-09-19
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Publication No.: US09166161B2Publication Date: 2015-10-20
- Inventor: Matthew J. BrightSky , Chung H. Lam , Jing Li , Alejandro G. Schrott , Norma E. Sosa Cortes
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Hopewell Junction
- Assignee: GlobalFoundries U.S. 2 LLC
- Current Assignee: GlobalFoundries U.S. 2 LLC
- Current Assignee Address: US NY Hopewell Junction
- Agent Ido Tuchman
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A phase change memory cell and a method for fabricating the phase change memory cell. The phase change memory cell includes a bottom electrode and a first non-conductive layer. The first non-conductive layer defines a first well, a first electrically conductive liner lines the first well, and the first well is filled with a phase change material in the phase change memory cell. A second non-conductive layer is deposited above the first non-conductive layer. A second well is defined by the second non-conductive layer and positioned directly above the first well. A second electrically conductive liner lines at least one wall of the second well such that the second electrically conductive liner is not in physical contact with the first electrically conductive liner. Furthermore, the phase change material is deposited in the second well.
Public/Granted literature
- US20150001459A1 PHASE CHANGE MEMORY CELL WITH LARGE ELECTRODE CONTACT AREA Public/Granted day:2015-01-01
Information query
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