Invention Grant
- Patent Title: Hybrid integrated component and method for the manufacture thereof
- Patent Title (中): 混合集成组件及其制造方法
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Application No.: US13916094Application Date: 2013-06-12
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Publication No.: US09169116B2Publication Date: 2015-10-27
- Inventor: Johannes Classen , Paul Farber
- Applicant: Johannes Classen , Paul Farber
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102012210049 20120614
- Main IPC: B81C3/00
- IPC: B81C3/00 ; B81B7/00 ; B81B7/02 ; B81C1/00 ; B81B3/00

Abstract:
An expansion of the functional scope of a hybrid integrated component including an MEMS element, a cap for the micromechanical structure of the MEMS element, and an ASIC element having circuit components is provided. In this component, the circuit components of the ASIC element interact with the micromechanical structure of the MEMS element. The MEMS element is mounted on the ASIC element in such a way that the micromechanical structure of the MEMS element is situated in a cavity between the cap and the ASIC element. The ASIC element is additionally equipped with the circuit components of a magnetic sensor system. These circuit components are produced in or on the CMOS back-end stack of the ASIC element. The magnetic sensor system may thus be implemented without enlarging the chip area.
Public/Granted literature
- US20130334621A1 HYBRID INTEGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF Public/Granted day:2013-12-19
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