Invention Grant
- Patent Title: Design-based inspection using repeating structures
- Patent Title (中): 使用重复结构的基于设计的检查
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Application No.: US13420224Application Date: 2012-03-14
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Publication No.: US09170211B2Publication Date: 2015-10-27
- Inventor: Ashok V. Kulkarni , Chien-Huei (Adam) Chen
- Applicant: Ashok V. Kulkarni , Chien-Huei (Adam) Chen
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G01N21/956 ; G01N21/95
Abstract:
Systems and methods for design-based inspection using repeating structures are provided.
Public/Granted literature
- US20120243773A1 Design-Based Inspection Using Repeating Structures Public/Granted day:2012-09-27
Information query
