Invention Grant
- Patent Title: ALD process window combinatorial screening tool
- Patent Title (中): ALD过程窗口组合筛选工具
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Application No.: US13725877Application Date: 2012-12-21
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Publication No.: US09175389B2Publication Date: 2015-11-03
- Inventor: Jeremy Cheng
- Applicant: Intermolecular, Inc.
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/52 ; C23C16/54 ; C23C16/44 ; H01L21/67 ; C23C14/56
Abstract:
Systems and apparatus are described that facilitate the evaluation and characterization of ALD processes as a function of process parameters such as temperature, gas flow rate, and pressure. In some embodiments, systems and apparatus are described that allow the ALD process to be characterized at different pressures in a combinatorial manner.
Public/Granted literature
- US20140174540A1 ALD Process Window Combinatorial Screening Tool Public/Granted day:2014-06-26
Information query
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