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US09176020B2 Pressure sensor having multiple pressure cells and sensitivity estimation methodology 有权
压力传感器具有多个压力传感器和灵敏度估算方法

Pressure sensor having multiple pressure cells and sensitivity estimation methodology
Abstract:
A pressure sensor (20) includes a test cell (32) and sense cell (34). The sense cell (34) includes an electrode (42) formed on a substrate (30) and a sense diaphragm (68) spaced apart from the electrode (42) to produce a sense cavity (64). The test cell (32) includes an electrode (40) formed on the substrate (30) and a test diaphragm (70) spaced apart from the electrode (40) to produce a test cavity (66). Both of the cells (32, 34) are sensitive to pressure (36). However, a critical dimension (76) of the sense diaphragm (68) is less than a critical dimension (80) of the test diaphragm (70) so that the test cell (32) has greater sensitivity (142) to pressure (36) than the sense cell (34). Parameters (100) measured at the test cell (32) are utilized to estimate a sensitivity (138) of the sense cell (34).
Abstract(Chinese):

压力传感器（20）包括测试单元（32）和感测单元（34）。 感测单元（34）包括形成在基板（30）上的电极（42）和与电极（42）间隔开的感测隔膜（68）以产生感测腔（64）。 测试电池（32）包括形成在基板（30）上的电极（40）和与电极（40）间隔开的测试膜（70），以产生测试腔（66）。 两个电池（32,34）对压力敏感（36）。 然而，感测隔膜（68）的临界尺寸（76）小于测试隔膜（70）的临界尺寸（80），使得测试电池（32）具有较高的灵敏度（142）至压力（36） 比感测单元（34）。 在测试单元（32）处测量的参数（100）用于估计感测单元（34）的灵敏度（138）。

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