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公开(公告)号：US09488542B2
公开(公告)日：2016-11-08
申请号：US14823851
申请日：2015-08-11
Applicant: FREESCALE SEMICONDUCTOR, INC.
Inventor： Chad S. Dawson , Peter T. Jones
CPC classification number: G01L25/00 , G01L1/04 , G01L1/142 , G01L1/148 , G01L9/0073 , G01L27/002
Abstract: A pressure sensor (20) includes a test cell (32) and sense cell (34). The sense cell (34) includes an electrode (42) formed on a substrate (30) and a sense diaphragm (68) spaced apart from the electrode (42) to produce a sense cavity (64). The test cell (32) includes an electrode (40) formed on the substrate (30) and a test diaphragm (70) spaced apart from the electrode (40) to produce a test cavity (66). Both of the cells (32, 34) are sensitive to pressure (36). However, a critical dimension (76) of the sense diaphragm (68) is less than a critical dimension (80) of the test diaphragm (70) so that the test cell (32) has greater sensitivity (142) to pressure (36) than the sense cell (34). Parameters (100) measured at the test cell (32) are utilized to estimate a sensitivity (138) of the sense cell (34).
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2.发明申请PRESSURE SENSOR HAVING MULTIPLE PRESSURE CELLS AND SENSITIVITY ESTIMATION METHODOLOGY 有权具有多个压力电池的压力传感器和灵敏度估算方法公开(公告)号：US20150346046A1
公开(公告)日：2015-12-03
申请号：US14823851
申请日：2015-08-11
Applicant: FREESCALE SEMICONDUCTOR, INC.
Inventor： CHAD S. DAWSON , Peter T. Jones
CPC classification number: G01L25/00 , G01L1/04 , G01L1/142 , G01L1/148 , G01L9/0073 , G01L27/002
Abstract: A pressure sensor (20) includes a test cell (32) and sense cell (34). The sense cell (34) includes an electrode (42) formed on a substrate (30) and a sense diaphragm (68) spaced apart from the electrode (42) to produce a sense cavity (64). The test cell (32) includes an electrode (40) formed on the substrate (30) and a test diaphragm (70) spaced apart from the electrode (40) to produce a test cavity (66). Both of the cells (32, 34) are sensitive to pressure (36). However, a critical dimension (76) of the sense diaphragm (68) is less than a critical dimension (80) of the test diaphragm (70) so that the test cell (32) has greater sensitivity (142) to pressure (36) than the sense cell (34). Parameters (100) measured at the test cell (32) are utilized to estimate a sensitivity (138) of the sense cell (34).
Abstract translation: 压力传感器（20）包括测试单元（32）和感测单元（34）。 感测单元（34）包括形成在基板（30）上的电极（42）和与电极（42）间隔开的感测隔膜（68）以产生感测腔（64）。 测试电池（32）包括形成在基板（30）上的电极（40）和与电极（40）间隔开的测试膜（70），以产生测试腔（66）。 两个电池（32,34）对压力敏感（36）。 然而，感测隔膜（68）的临界尺寸（76）小于测试隔膜（70）的临界尺寸（80），使得测试电池（32）具有较高的灵敏度（142）至压力（36） 比感测单元（34）。 在测试单元（32）处测量的参数（100）用于估计感测单元（34）的灵敏度（138）。
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3.发明申请公开(公告)号：US20150048848A1
公开(公告)日：2015-02-19
申请号：US13967877
申请日：2013-08-15
Applicant: FREESCALE SEMICONDUCTOR, INC.
Inventor： Chad S. Dawson , Peter T. Jones , Bruno J. Debeurre
CPC classification number: G01R27/2605 , B81B2201/0264 , B81C99/003 , G01L9/0072 , G01L27/002 , G01L27/005
Abstract: A test structure includes two capacitor structures, wherein one of the capacitor structures has conductor plates spaced apart by a cavity, and the other capacitor structure does not include a cavity. Methodology entails forming the test structure and a pressure sensor on the same substrate using the same fabrication process techniques. Methodology for estimating the sensitivity of the pressure sensor includes detecting capacitances for each of the two capacitor structures and determining a ratio of the capacitances. A critical dimension of the cavity in one of the capacitor structures is estimated using the ratio, and the sensitivity of the pressure sensor is estimated using the critical dimension.
Abstract translation: 测试结构包括两个电容器结构，其中电容器结构中的一个具有由空腔隔开的导体板，而另一个电容器结构不包括空腔。 方法需要使用相同的制造工艺技术在同一基板上形成测试结构和压力传感器。 用于估计压力传感器的灵敏度的方法包括检测两个电容器结构中的每一个的电容，并确定电容的比率。 使用该比率来估计电容器结构中的一个中的腔的关键尺寸，并且使用临界尺寸来估计压力传感器的灵敏度。
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4.发明授权Test structure and methodology for estimating sensitivity of pressure sensors 有权用于估计压力传感器灵敏度的测试结构和方法公开(公告)号：US09285404B2
公开(公告)日：2016-03-15
申请号：US13967877
申请日：2013-08-15
Applicant: FREESCALE SEMICONDUCTOR, INC.
Inventor： Chad S. Dawson , Peter T. Jones , Bruno J. Debeurre
CPC classification number: G01R27/2605 , B81B2201/0264 , B81C99/003 , G01L9/0072 , G01L27/002 , G01L27/005
Abstract: A test structure includes two capacitor structures, wherein one of the capacitor structures has conductor plates spaced apart by a cavity, and the other capacitor structure does not include a cavity. Methodology entails forming the test structure and a pressure sensor on the same substrate using the same fabrication process techniques. Methodology for estimating the sensitivity of the pressure sensor includes detecting capacitances for each of the two capacitor structures and determining a ratio of the capacitances. A critical dimension of the cavity in one of the capacitor structures is estimated using the ratio, and the sensitivity of the pressure sensor is estimated using the critical dimension.
Abstract translation: 测试结构包括两个电容器结构，其中电容器结构中的一个具有由空腔隔开的导体板，而另一个电容器结构不包括空腔。 方法需要使用相同的制造工艺技术在同一基板上形成测试结构和压力传感器。 用于估计压力传感器的灵敏度的方法包括检测两个电容器结构中的每一个的电容，并确定电容的比率。 使用该比率来估计电容器结构中的一个中的腔的关键尺寸，并且使用临界尺寸来估计压力传感器的灵敏度。
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公开(公告)号：US09285289B2
公开(公告)日：2016-03-15
申请号：US14099149
申请日：2013-12-06
Applicant: FREESCALE SEMICONDUCTOR, INC.
Inventor： Chad S. Dawson , Peter T. Jones
CPC classification number: G01L27/002 , B81B2201/0264 , B81C99/003 , G01L9/0073 , H01L41/08
Abstract: A MEMS pressure sensor (70) includes a sense cell (80), a test cell (82), and a seal structure (84). The test cell includes a test cavity (104), and the seal structure (84) is in communication with the test cavity, wherein the seal structure is configured to be breached to change an initial cavity pressure (51) within the test cavity (104) to ambient pressure (26). Calibration methodology (180) entails obtaining (184) a test signal (186) from the test cell prior to breaching the seal structure, and obtaining (194) another test signal (196) after the seal structure is breached. The test signals are used to calculate a sensitivity (200) of the test cell, the calculated sensitivity is used to estimate the sensitivity (204) of the sense cell, and the estimated sensitivity (204) can be used to calibrate the sense cell.
Abstract translation: MEMS压力传感器（70）包括感测单元（80），测试单元（82）和密封结构（84）。 测试单元包括测试空腔（104），并且密封结构（84）与测试空腔连通，其中密封结构构造成被破坏以改变测试空腔（104）内的初始空腔压力（51） ）到环境压力（26）。 校准方法（180）需要在破坏密封结构之前从测试单元获得（184）测试信号（186），并且在密封结构被破坏之后获得（194）另一个测试信号（196）。 测试信号用于计算测试单元的灵敏度（200），计算的灵敏度用于估计感测单元的灵敏度（204），并且估计的灵敏度（204）可用于校准感测单元。
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Patent Agency Ranking
6.发明授权公开(公告)号：US09527731B2
公开(公告)日：2016-12-27
申请号：US14514438
申请日：2014-10-15
Applicant: FREESCALE SEMICONDUCTOR, INC.
Inventor： Bruno J. Debeurre , Peter T. Jones , William D. McWhorter , Raimondo P. Sessego
CPC classification number: B81C99/004 , B81C99/005 , B81C99/007 , G01L27/005
Abstract: A method for testing a plurality of pressure sensors on a device wafer includes placing a diaphragm of one of the pressure sensors on the device wafer in proximity to a nozzle of a test system. A pneumatic pressure stimulus is applied to the diaphragm via an outlet of the nozzle and a cavity pressure is measured within a cavity associated with the pressure sensor in response to application of the pneumatic pressure stimulus. The pneumatic pressure stimulus within the cavity corresponds to the pressure applied to the diaphragm. Methodology is executed to test the strength and/or stiffness of the diaphragm. Additionally, the methodology and test system can be utilized to determine an individual calibration factor for each pressure sensor on the device wafer.
Abstract translation: 用于在设备晶片上测试多个压力传感器的方法包括将一个压力传感器的膜片放置在设备晶片上靠近测试系统的喷嘴。 通过喷嘴的出口将气动压力刺激施加到隔膜，并响应于气动压力刺激的应用，在与压力传感器相关联的空腔内测量空腔压力。 空腔内的气动压力刺激对应于施加到隔膜上的压力。 执行方法来测试隔膜的强度和/或刚度。 另外，方法学和测试系统可用于确定设备晶片上每个压力传感器的单独校准因子。
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7.发明授权Pressure sensor having multiple pressure cells and sensitivity estimation methodology 有权压力传感器具有多个压力传感器和灵敏度估算方法公开(公告)号：US09176020B2
公开(公告)日：2015-11-03
申请号：US14043556
申请日：2013-10-01
Applicant: FREESCALE SEMICONDUCTOR, INC.
Inventor： Chad S. Dawson , Peter T. Jones
CPC classification number: G01L25/00 , G01L1/04 , G01L1/142 , G01L1/148 , G01L9/0073 , G01L27/002
Abstract: A pressure sensor (20) includes a test cell (32) and sense cell (34). The sense cell (34) includes an electrode (42) formed on a substrate (30) and a sense diaphragm (68) spaced apart from the electrode (42) to produce a sense cavity (64). The test cell (32) includes an electrode (40) formed on the substrate (30) and a test diaphragm (70) spaced apart from the electrode (40) to produce a test cavity (66). Both of the cells (32, 34) are sensitive to pressure (36). However, a critical dimension (76) of the sense diaphragm (68) is less than a critical dimension (80) of the test diaphragm (70) so that the test cell (32) has greater sensitivity (142) to pressure (36) than the sense cell (34). Parameters (100) measured at the test cell (32) are utilized to estimate a sensitivity (138) of the sense cell (34).
Abstract translation: 压力传感器（20）包括测试单元（32）和感测单元（34）。 感测单元（34）包括形成在基板（30）上的电极（42）和与电极（42）间隔开的感测隔膜（68）以产生感测腔（64）。 测试电池（32）包括形成在基板（30）上的电极（40）和与电极（40）间隔开的测试膜（70），以产生测试腔（66）。 两个电池（32,34）对压力敏感（36）。 然而，感测隔膜（68）的临界尺寸（76）小于测试隔膜（70）的临界尺寸（80），使得测试电池（32）具有较高的灵敏度（142）至压力（36） 比感测单元（34）。 在测试单元（32）处测量的参数（100）用于估计感测单元（34）的灵敏度（138）。
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公开(公告)号：US20150090052A1
公开(公告)日：2015-04-02
申请号：US14043556
申请日：2013-10-01
Applicant: FREESCALE SEMICONDUCTOR, INC.
Inventor： Chad S. Dawson , Peter T. Jones
CPC classification number: G01L25/00 , G01L1/04 , G01L1/142 , G01L1/148 , G01L9/0073 , G01L27/002
Abstract: A pressure sensor (20) includes a test cell (32) and sense cell (34). The sense cell (34) includes an electrode (42) formed on a substrate (30) and a sense diaphragm (68) spaced apart from the electrode (42) to produce a sense cavity (64). The test cell (32) includes an electrode (40) formed on the substrate (30) and a test diaphragm (70) spaced apart from the electrode (40) to produce a test cavity (66). Both of the cells (32, 34) are sensitive to pressure (36).However, a critical dimension (76) of the sense diaphragm (68) is less than a critical dimension (80) of the test diaphragm (70) so that the test cell (32) has greater sensitivity (142) to pressure (36) than the sense cell (34). Parameters (100) measured at the test cell (32) are utilized to estimate a sensitivity (138) of the sense cell (34).
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公开(公告)号：US10393618B2
公开(公告)日：2019-08-27
申请号：US15189892
申请日：2016-06-22
Applicant: FREESCALE SEMICONDUCTOR INC.
Inventor： Peter T. Jones , Arvind Salian , William D. McWhorter , Chad Krueger , John Shipman , Michael Naumann , Larry D. Metzler , Tripti Regmi
Abstract: Methods and apparatuses are provided for evaluating or testing stiction in Microelectromechanical Systems (MEMS) devices utilizing a mechanized shock pulse generation approach. In one embodiment, the method includes the step or process of loading a MEMS device, such as a multi-axis MEMS accelerometer, into a socket provided on a Device-Under-Test (DUT) board. After loading the MEMS device into the socket, a series of controlled shock pulses is generated and transmitted through the MEMS device utilizing a mechanized test apparatus. The mechanized test apparatus may, for example, repeatedly move the DUT board over a predefined motion path to generate the controlled shock pulses. In certain cases, transverse vibrations may also be directed through the tested MEMS device in conjunction with the shock pulses. An output of the MEMS device is then monitored to determine whether stiction of the MEMS device occurs during each of the series of controlled shock pulses.
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10.发明授权Transducer-including devices, and methods and apparatus for their calibration 有权包含传感器的设备，以及用于校准的方法和设备公开(公告)号：US09365413B2
公开(公告)日：2016-06-14
申请号：US13962717
申请日：2013-08-08
Applicant: FREESCALE SEMICONDUCTOR, INC.
Inventor： Andres Barrilado , Peter T. Jones , Stephane Lestringuez , Seyed K. Paransun , Raimondo P. Sessego , James D. Stanley
CPC classification number: B81B7/008 , G01C25/005 , G01P15/0802 , G01P21/00
Abstract: Embodiments of packaged transducer-including devices and methods for their calibration are disclosed. Each device includes one or more transducers, an interface configured to facilitate communications with an external calibration controller, a memory, and a processing component. The external calibration controller sends calibration commands to the transducer-including devices through a communication structure. The processing component of each device executes code in response to receiving the calibration commands. Execution of the code includes generating transducer data from the one or more transducers, calculating calibration coefficients using the transducer data, and storing the calibration coefficients within the memory of the device.
Abstract translation: 公开了包括换能器的装置及其校准方法的实施例。 每个设备包括一个或多个换能器，被配置为促进与外部校准控制器，存储器和处理部件的通信的接口。 外部校准控制器通过通信结构向校准器发送校准命令。 响应于接收到校准命令，每个设备的处理组件执行代码。 代码的执行包括从一个或多个换能器产生换能器数据，使用换能器数据计算校准系数，以及将校准系数存储在该装置的存储器内。
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