Invention Grant
US09178040B2 Innovative approach of 4F2 driver formation for high-density RRAM and MRAM
有权
用于高密度RRAM和MRAM的4F2驱动器形成的创新方法
- Patent Title: Innovative approach of 4F2 driver formation for high-density RRAM and MRAM
- Patent Title (中): 用于高密度RRAM和MRAM的4F2驱动器形成的创新方法
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Application No.: US13674204Application Date: 2012-11-12
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Publication No.: US09178040B2Publication Date: 2015-11-03
- Inventor: Yu-Wei Ting , Chun-Yang Tsai , Kuo-Ching Huang
- Applicant: Taiwan Semiconductor Manufacturing Co. Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L27/22 ; H01L27/24

Abstract:
Some embodiments of the present disclosure relate to a vertical MOSFET selection transistor that is configured to suppress leakage voltage in the memory cell without limiting the size of the memory cell. The memory selection transistor has a semiconductor body with first and second trenches that define a raised semiconductor structure having a source region, a channel region, and a drain region. A gate structure has a first gate electrode in the first trench, which extends vertically along a first side of the raised semiconductor structure, and a second gate electrode in the second trench, which extends vertically along an opposite, second side of the raised semiconductor structure. The first and second gate electrodes collectively control the flow of current between the source and drain region in the raised semiconductor structure. An electrical contact couples the drain region to a data storage element configured to store data.
Public/Granted literature
- US20140131794A1 Innovative Approach of 4F² Driver Formation for High-Density RRAM and MRAM Public/Granted day:2014-05-15
Information query
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