Invention Grant
US09178053B2 Transistor device with improved source/drain junction architecture and methods of making such a device
有权
具有改善的源极/漏极结结构的晶体管器件和制造这种器件的方法
- Patent Title: Transistor device with improved source/drain junction architecture and methods of making such a device
- Patent Title (中): 具有改善的源极/漏极结结构的晶体管器件和制造这种器件的方法
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Application No.: US14579122Application Date: 2014-12-22
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Publication No.: US09178053B2Publication Date: 2015-11-03
- Inventor: Jerome Ciavatti , Johannes M. van Meer
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/10 ; H01L29/66 ; H01L29/08 ; H01L29/36

Abstract:
One illustrative device disclosed herein includes a plurality of source/drain regions positioned in an active region on opposite sides of a gate structure, each of the source/drain regions having a lateral width in a gate length direction of the transistor and a plurality of halo regions, wherein each of the halo regions is positioned under a portion, but not all, of the lateral width of one of the plurality of source/drain regions. A method disclosed herein includes forming a plurality of halo implant regions in an active region, wherein an outer edge of each of the halo implant regions is laterally spaced apart from an adjacent inner edge of an isolation region.
Public/Granted literature
- US20150108586A1 TRANSISTOR DEVICE WITH IMPROVED SOURCE/DRAIN JUNCTION ARCHITECTURE AND METHODS OF MAKING SUCH A DEVICE Public/Granted day:2015-04-23
Information query
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