Invention Grant
- Patent Title: Optical surface scanning systems and methods
- Patent Title (中): 光学表面扫描系统和方法
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Application No.: US13916334Application Date: 2013-06-12
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Publication No.: US09182341B2Publication Date: 2015-11-10
- Inventor: Ivan Maleev
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Meyertons, Hood, Kivlin, Kowert & Goetzel, P.C.
- Agent Eric B. Meyertons
- Main IPC: G01J3/42
- IPC: G01J3/42 ; G01N21/25 ; G01N21/47 ; G01N21/95 ; G03F7/20
Abstract:
An optical scanning system may include a moving sample positioning stage that supports the sample during an optical measurement of the sample using the light source and the spectrometer. The moving sample positioning stage may move the sample in at least one direction during the optical measurement of the sample. A scatterometer system may include collection imaging optics for imaging the reflected light onto a multi-pixel sensor that collects and analyze the reflected light.
Public/Granted literature
- US20130335736A1 OPTICAL SURFACE SCANNING SYSTEMS AND METHODS Public/Granted day:2013-12-19
Information query
