发明授权
- 专利标题: Semiconductor integrated device with mechanically decoupled active area and related manufacturing process
- 专利标题(中): 半导体集成器件具有机械解耦有源区和相关制造工艺
-
申请号: US13719103申请日: 2012-12-18
-
公开(公告)号: US09184138B2公开(公告)日: 2015-11-10
- 发明人: Angelo Antonio Merassi , Marco Ferrera , Marco Mantovani , Paolo Ferrari , Benedetto Vigna
- 申请人: STMicroelectronics (Grenoble 2) SAS , STMicroelectronics S.r.l.
- 申请人地址: FR Grenoble IT Agrate Brianza
- 专利权人: STMicroelectronics (Grenoble 2) SAS,STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics (Grenoble 2) SAS,STMicroelectronics S.r.l.
- 当前专利权人地址: FR Grenoble IT Agrate Brianza
- 代理机构: Seed IP Law Group PLLC
- 优先权: ITTO2011A1233 20111229
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L21/56 ; H01L23/16 ; H01L23/31
摘要:
A semiconductor integrated device is provided with: a die having a body of semiconductor material with a front surface, and an active area arranged at the front surface; and a package having a support element carrying the die at a back surface of the body, and a coating material covering the die. The body includes a mechanical decoupling region, which mechanically decouples the active area from mechanical stresses induced by the package; the mechanical decoupling region is a trench arrangement within the body, which releases the active area from an external frame of the body, designed to absorb the mechanical stresses induced by the package.
公开/授权文献
信息查询
IPC分类: