Invention Grant
- Patent Title: Semiconductor integrated device with mechanically decoupled active area and related manufacturing process
- Patent Title (中): 半导体集成器件具有机械解耦有源区和相关制造工艺
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Application No.: US13719103Application Date: 2012-12-18
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Publication No.: US09184138B2Publication Date: 2015-11-10
- Inventor: Angelo Antonio Merassi , Marco Ferrera , Marco Mantovani , Paolo Ferrari , Benedetto Vigna
- Applicant: STMicroelectronics (Grenoble 2) SAS , STMicroelectronics S.r.l.
- Applicant Address: FR Grenoble IT Agrate Brianza
- Assignee: STMicroelectronics (Grenoble 2) SAS,STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics (Grenoble 2) SAS,STMicroelectronics S.r.l.
- Current Assignee Address: FR Grenoble IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2011A1233 20111229
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/56 ; H01L23/16 ; H01L23/31

Abstract:
A semiconductor integrated device is provided with: a die having a body of semiconductor material with a front surface, and an active area arranged at the front surface; and a package having a support element carrying the die at a back surface of the body, and a coating material covering the die. The body includes a mechanical decoupling region, which mechanically decouples the active area from mechanical stresses induced by the package; the mechanical decoupling region is a trench arrangement within the body, which releases the active area from an external frame of the body, designed to absorb the mechanical stresses induced by the package.
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