发明授权
- 专利标题: Memory cell support lattice
- 专利标题(中): 存储单元支持格
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申请号: US13590791申请日: 2012-08-21
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公开(公告)号: US09184167B2公开(公告)日: 2015-11-10
- 发明人: Zhimin Song , Che-Chi Lee , Brett Busch
- 申请人: Zhimin Song , Che-Chi Lee , Brett Busch
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Brooks, Cameron & Huebsch, PLLC
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/8242 ; H01L49/02
摘要:
Memory cell support lattices and methods of forming the same are described herein. As an example, a method of forming a memory cell support lattice includes forming a mask on a number of capacitor elements in an array, such that a space between vertically and horizontally adjacent capacitor elements is fully covered and a space between diagonally adjacent capacitor elements is partially covered and forming a support lattice in a support material by etching the support material to remove portions of the support material below the openings in the mask.
公开/授权文献
- US20140054745A1 MEMORY CELL SUPPORT LATTICE 公开/授权日:2014-02-27
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