Invention Grant
- Patent Title: Apparatus and method for calibrating extreme ultraviolet spectrometer
- Patent Title (中): 用于校准极紫外光谱仪的仪器和方法
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Application No.: US14225698Application Date: 2014-03-26
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Publication No.: US09188484B2Publication Date: 2015-11-17
- Inventor: Young Min Jhon , Yong Soo Kim , Min Ah Seo , Jae Hun Kim , Min Chul Park , Sun Ho Kim , Deok Ha Woo , Seok Lee , Taik Jin Lee , Myung Suk Chun , Woon Jo Cho
- Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: KR Seoul
- Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: KR Seoul
- Agency: Ladas & Parry LLP
- Priority: KR10-2014-0002963 20140109
- Main IPC: G01J3/02
- IPC: G01J3/02
Abstract:
Provided are an apparatus and method for calibrating an extreme ultraviolet (EUV) spectrometer in which a wavelength of a spectrum of EUV light used for EUV lithography and mask inspection technology can be measured accurately.
Public/Granted literature
- US20150192463A1 APPARATUS AND METHOD FOR CALIBRATING EXTREME ULTRAVIOLET SPECTROMETER Public/Granted day:2015-07-09
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