公开(公告)号：US11164390B2

公开(公告)日：2021-11-02

申请号：US17105883

申请日：2020-11-27

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Min Chul Park ,  Ji Hoon Kang ,  Jun Yong Choi ,  Kyul Ko ,  Dae Hwan Ahn ,  Dae Yeon Kim ,  Hyun Woo Ko

IPC: G06T19/00 ,  G06F3/01 ,  G06T1/20 ,  G06T15/20 ,  G01P13/00 ,  G06K9/00 ,  G02B5/30

Abstract: A user wears a virtual reality mask (VR mask) (100) and then watches a virtual reality image. The VR mask (100) blocks light incident from the outside. When the user wears the VR mask (100), the user cannot discover an obstacle (500) positioned outside the VR mask (100). The user may collide with the obstacle (500) and may be injured by the obstacle (500). Accordingly, in order to prevent injury to the user who uses the VR mask (100), it is necessary to make the user recognize the obstacle (500) positioned outside the VR mask (100). In order to recognize an obstacle, a virtual reality image and the obstacle may be displayed together, or the amount of light incident from the outside may be adjusted.

公开(公告)号：US09825421B2

公开(公告)日：2017-11-21

申请号：US15165568

申请日：2016-05-26

Applicant: Korea Institute of Science and Technology

Inventor： Young Min Jhon ,  Joon Mo Ahn ,  Seok Lee ,  Jae Hun Kim ,  Min Ah Seo ,  Chul Ki Kim ,  Taik Jin Lee ,  Deok Ha Woo ,  Min Chul Park

IPC: H01S3/115 ,  H01S3/11 ,  H01S3/13 ,  H01S3/127

CPC classification number: H01S3/1109 ,  H01S3/115 ,  H01S3/127 ,  H01S3/1305

Abstract: Provided is a single pulse laser apparatus. The apparatus including a resonator having a first mirror, a second mirror, a gain medium, and electro-optic modulators (EOMs) which perform each mode-locking and Q-switching, the apparatus includes a photodiode which measures laser light that oscillates from the resonator, a synchronizer which converts an electrical signal generated by measuring the laser light into a transistor-transistor logic (TTL) signal, a delay unit which sets a latency determined in order to synchronize a mode-locked pulse with a Q-switched pulse to the TTL signal, and outputs a trigger TTL signal according to the latency, and a Q-driver which inputs the trigger TTL signal to the EOM which performs Q-switching, and causes the EOM to operates.

公开(公告)号：US09844125B2

公开(公告)日：2017-12-12

申请号：US14979729

申请日：2015-12-28

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Young Min Jhon ,  Yong Soo Kim ,  Joon Mo Ahn ,  Min Ah Seo ,  Jae Hun Kim ,  Min Chul Park ,  Young Tae Byun ,  Chul Ki Kim ,  Seok Lee ,  Deok Ha Woo

IPC: H05G2/00

CPC classification number: H05G2/003 ,  H05G2/008

Abstract: Provided is an extreme ultra-violet (EUV) beam generation apparatus using multi-gas cell modules in which a gas is prevented from directly flowing into a vacuum chamber by adding an auxiliary gas cell serving as a buffer chamber to a main gas cell, a diffusion rate of the gas is decreased, a high vacuum state is maintained, and a higher power EUV beam is continuously generated.

公开(公告)号：US09188484B2

公开(公告)日：2015-11-17

申请号：US14225698

申请日：2014-03-26

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Young Min Jhon ,  Yong Soo Kim ,  Min Ah Seo ,  Jae Hun Kim ,  Min Chul Park ,  Sun Ho Kim ,  Deok Ha Woo ,  Seok Lee ,  Taik Jin Lee ,  Myung Suk Chun ,  Woon Jo Cho

IPC: G01J3/02

CPC classification number: G01J3/0297 ,  G01J3/28 ,  G03F7/70516 ,  G03F7/70575 ,  G03F7/70616

Abstract: Provided are an apparatus and method for calibrating an extreme ultraviolet (EUV) spectrometer in which a wavelength of a spectrum of EUV light used for EUV lithography and mask inspection technology can be measured accurately.

Abstract translation: 提供了一种用于校准极紫外（EUV）光谱仪的装置和方法，其中可以精确地测量用于EUV光刻和掩模检查技术的EUV光的光谱的波长。

公开(公告)号：US09124067B2

公开(公告)日：2015-09-01

申请号：US14448227

申请日：2014-07-31

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Young Min Jhon ,  Joon Mo Ahn ,  Jae Hun Kim ,  Seok Lee ,  Min Chul Park ,  Deok Ha Woo ,  Young Tae Byun ,  Taik Jin Lee ,  Sun Ho Kim

IPC: H01S3/11 ,  H01S3/117 ,  H01S3/106

CPC classification number: H01S3/117 ,  H01S3/08027 ,  H01S3/1062 ,  H01S3/1068 ,  H01S3/11 ,  H01S3/1103 ,  H01S3/1106 ,  H01S3/1109 ,  H01S3/1112 ,  H01S3/1623

Abstract: Provided is a pulse laser apparatus for generating laser light. The apparatus includes a first mirror and a second mirror which are disposed at both ends of a resonator and configured to reflect the laser light, a gain medium disposed between the first and second mirrors and configured to amplify and output light incident from an outside, an etalon configured to adjust a pulse width of the laser light, and an acousto-optic modulator disposed between the first and second mirrors and configured to form a mode-locked and Q-switched signal from the laser light, in which some of the laser light is output through either the first or second mirror to outside the resonator.

Abstract translation: 提供了一种用于产生激光的脉冲激光装置。 该装置包括：第一反射镜和第二反射镜，其设置在谐振器的两端并被配置为反射激光;增益介质，设置在第一和第二反射镜之间并且被配置为放大并输出从外部入射的光， 标准准则被配置为调整激光的脉冲宽度，以及声光调制器，其布置在第一和第二反射镜之间并被配置为从激光形成锁模和Q开关信号，其中一些激光 通过第一或第二反射镜输出到谐振器外部。